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{color:#000080}{*}Local{*}{color} {color:#800000}{*}1176{*}{color}

{color:#000080}{*}Usagers :*{color}

{color:#800000}Saman Choubak (saman.choubak@polymtl.ca){color}

{color:#000080}{*}Responsable:*{color}

{color:#800000}Pierre Lévesque (p.levesque@umontreal.ca){color}

h3. Description
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h3. Procédures
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h4. {color:#800000}XPS Argon Sputtering Gun - Procedure{color}

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*Procedure to sputter the surface of the sample in the XPS-LEEM chamber with the Argon Sputtering Gun:*

*1) Make sure the X-ray source is fully retracted.*

*2) Put the sample in place and check all the pressures.*

*3) Close the ion pump gate valve.*

*4) Close completly the turbo pump gate valve, then open it (hear the click) and do a turn (the value should be 1/6 open).*

*5) Check the pressure of the Ar and make sure the Ar switch is on.*

*6) Bridge the interlock on the Rack.*

*7) Slowly open the Ar valve (Monitor the chamber pressure while opening the valve).*

*8) Stop opening the Ar valve once the chamber pressure reaches 6x10-6 or 1x10-5 mbar.*

*9) Switch on the IQE11-A source and switch Operate, slowly increase the energy monitoring the chamber pressure. Leave it @ 1.01 keV.*

*10) Allow 30 min sputtering.*

*11) On the IQE-11-A, turn the energy knob to zero and go to stand by.*

*12) Close the Ar valve.*

*13) Open the turbo pump gate valve.*

*14) Once the chamber pressure reaches low  10-8 mbar, open the ion pump valve.*
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h4. {color:#800000}Sample Annealing in the XPS Chamber - Procedure{color}

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*Procedure to anneal the sample in the XPS-LEEM chamber:*

*1) Turn on the primary pump.*

*2) Slowly increase the filament current (check the emission).*

*3) Once the filament start emiiting, go very slowly on the filament current and look at the sample.*

*4) Stop at desired sample temperature and anneal for 3-5 minutes (or desired time).*

*5) Slowly decrease the filament current.*

*6) Decrease the accelerating voltage to 0.*

*7) Once everything is 0, unplug the filament current \(+) or \(-) from the back.*

*8) Stop opening the Ar valve once the chamber pressure reaches 6x10-6 or 1x10-5 mbar.*

*9) Turn off the sample heater.*

*10) Plug back the wire.*
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