Local 1171-1175
Responsables:
Benoit (benoit@polymtl.ca).
François Lapointe (francois.lapointe.1@umontreal.ca).
Khalid Laaziri (khalid.laaziri@umontreal.ca).
Description
Système d'évaporation de métaux (Or, Palladium, Titane, Chrome, Aluminium,...).
Modèle AUTO 306 de la compagnie BOC EDWARDS.
Procédures
Paramètres d'évaporation pour les différents métaux
Manuels et documentation
[AUTO 306 Vacuum Coater - Vol 1|^AUTO 306 VACUUM COATER WITH TURBOMOLECULAR PUMPING SYSTEM vol 1.pdf]
[AUTO 306 Vacuum Coater - Vol 2|^AUTO 306 VACUUM COATER - OPERATING INSTRUCTIONS vol 2.pdf]
[Electron Beam Source|^EB3 MULTIHEARTH ELECTRON BEAM SOURCE AND ACCESSORIES.pdf]
[Film Thichness Monitor FTM7|^FTM7 FILM THICKNESS MONITOR.pdf]
[Source Shutter|^MANUAL SOURCE SHUTTER AND ELECTROMAGNETIC SOURCE SHUTTER.pdf]
[Crystal and oscillator unit|^WATER COOLED CRYSTAL HOLDER, CRYSTALS AND OSCILLATOR UNIT.pdf]
[Workholder|^WORKHOLDER AND HEATER ACCESSORIES.pdf]